Browsing bySubjectNon-ideal ALD

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Issue DateTitleAuthor(s)
2013-12Influences of metal, non-metal precursors, and substrates on atomic layer deposition processes for the growth of selected functional electronic materialsLee, Sang Woon; Choi, Byung Joon; Eom, Taeyong; Han, Jeong Hwan; Kim, Seong Keun; Song, Seul Ji; Lee, Woongkyu; Hwang, Cheol Seong

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