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2014-05
An Insight into Grain Refinement Mechanism of Ultrananocrystalline Diamond Films Obtained by Direct Current Plasma-Assisted Chemical Vapor Deposition
Lee, Hak-Joo
;
Cho, Jung-Min
;
Kim, Inho
;
Lee, Seung-Cheol
;
Park, Jong-Keuk
;
Baik, Young-Joon
;
Lee, Wook-Seong
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BIAS-ENHANCED NUCLEATION
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chemical vapor deposition (CVD)
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electron stimulated desorptions
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