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2023
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Issue Date
Title
Author(s)
2023-03
Radial microstructural nonuniformity of boron nitride films deposited on a wafer scale substrate by unbalanced magnetron sputtering
Choi, Younghwan
;
J-Y. Huh
;
Baik, Young Joon
2023-11
DC 마그네트론 스퍼터링에서 입방정 질화붕소 박막의 증착 거동에 미치는 이온 플럭스 변화의 영향
Choi, Younghwan
;
허주열
;
Baik, Young Joon
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Baik, Young Joon
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J-Y. Huh
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허주열
-Subject
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ADHESION
1
BN
1
CBN FILMS
1
Cubic boron nitride
1
cubic boron nitride thin film
1
Film uniformity
1
ion bombardment
1
Ion flux
1
ion flux variation
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Microstructure
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2023
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