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KIST Conference Paper
2017
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Issue Date
Title
Author(s)
2017-09
Analytical Calculation and Fabrication of FET-Embedded Capacitive Micromachined Ultrasonic Transducer
Jin soo Park
;
Kim Jung Yeon
;
Ji-Hoon Lee
;
Hee-Kyoung Bae
;
Jinsik Kim
;
Kyo Seon Hwang
;
Jung Ho Park
;
Rino Choi
;
Lee, Byung Chul
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-Author
1
Hee-Kyoung Bae
1
Ji-Hoon Lee
1
Jin soo Park
1
Jinsik Kim
1
Jung Ho Park
1
Kim Jung Yeon
1
Kyo Seon Hwang
1
Lee, Byung Chul
1
Rino Choi
-Subject
1
Field-effect transistor-embedded ...
1
high-frequency operation
1
low-temperature wafer bonding
-Date issued
1
2017
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