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dc.contributor.author한승희-
dc.date.accessioned2024-01-13T00:03:56Z-
dc.date.available2024-01-13T00:03:56Z-
dc.date.issued1998-02-11-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/100033-
dc.title이중모드　플라즈마　이온주입장치　및 이를　사용한　표면개질방법-
dc.typePatent-
dc.date.registration1998-02-11-
dc.date.application1994-11-25-
dc.identifier.patentRegistrationNumber0137704-
dc.identifier.patentApplicationNumber1994-0031178-
dc.publisher.countryKO-
dc.type.iprs특허-
dc.contributor.assignee한국과학기술연구원-
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