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Low-Temperature Processing of Vanadium added PZT Thin Films by UV-assisted RTA

Authors

Kang, Min-Gyu; Cho Kwang Hwan; KANG, CHONG YUN; Sangsig Kim; YOON, SEOK JIN

Citation

21st International Symposium on Integrated Ferroelectrics and Functionalities

URI

https://pubs.kist.re.kr/handle/201004/100227

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