DSpace at KISTKIST Conference PaperOthers

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dc.contributor.authorLim Ki Pil-
dc.contributor.authorWi Jung-Sub-
dc.contributor.authorNam Sung-Wook-
dc.contributor.authorPark Soo-Yeon-
dc.contributor.authorLee Jae-Jong-
dc.contributor.authorKim Ki-Bum-
dc.date.accessioned2024-01-13T00:07:55Z-
dc.date.available2024-01-13T00:07:55Z-
dc.date.created2021-09-29-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/100301-
dc.languageEnglish-
dc.subjectnanoimprint-
dc.subjecthigh aspect ratio-
dc.subjecthigh resolution-
dc.subjectUV-NIL-
dc.titleFabrication scheme of a high resolution and high aspect ratio UV-nanoimprint mold-
dc.typeConference-
dc.description.journalClass1-
dc.identifier.bibliographicCitation2010 MRS spring-
dc.citation.title2010 MRS spring-
dc.citation.conferencePlaceUS-
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