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dc.contributor.authorPham Duc Cuong-
dc.contributor.authorNa, Kyounghwan-
dc.contributor.authorPiao Shuxue-
dc.contributor.authorYang Sung Wook-
dc.contributor.authorKIM, JINSEOK-
dc.contributor.authorYoon, Eui Sung-
dc.date.accessioned2024-01-13T00:30:51Z-
dc.date.available2024-01-13T00:30:51Z-
dc.date.created2021-09-29-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/100342-
dc.languageEnglish-
dc.subjectSurface modification-
dc.subjectHierarchical structure-
dc.subjectAdhesion-
dc.subjectFriction-
dc.subjectPFPE-
dc.titleFabrication of nano/micro-scale hierarchical structures for reducing adhesion and friction forces on silicon surfaces-
dc.typeConference-
dc.description.journalClass1-
dc.identifier.bibliographicCitationSTLE 65th Annual Meeting, pp.45-
dc.citation.titleSTLE 65th Annual Meeting-
dc.citation.startPage45-
dc.citation.conferencePlaceUS-
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