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Low Temperature Processing and Electrical Properties of PZT Thin Film with UV-assisted RTP

Authors

Kang, Min-Gyu; Cho Kwang Hwan; Oh SeungMin; 김상식; KANG, CHONG YUN; YOON, SEOK JIN

Citation

ICAMD

URI

https://pubs.kist.re.kr/handle/201004/100499

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KIST Conference Paper > Others

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