Full metadata record
DC Field | Value | Language |
---|---|---|
dc.contributor.author | A. Khodin | - |
dc.contributor.author | Lee, Joong Kee | - |
dc.contributor.author | Chang-Sam Kim | - |
dc.contributor.author | Kim Sang Ok | - |
dc.date.accessioned | 2024-01-13T01:02:50Z | - |
dc.date.available | 2024-01-13T01:02:50Z | - |
dc.date.created | 2021-09-29 | - |
dc.identifier.issn | - | - |
dc.identifier.uri | https://pubs.kist.re.kr/handle/201004/100738 | - |
dc.language | English | - |
dc.subject | amorphous silicon | - |
dc.subject | thin film | - |
dc.subject | CVD | - |
dc.subject | alumina | - |
dc.subject | nanocrystals | - |
dc.subject | composite materials | - |
dc.title | Amorphous-Nanocrystalline Silicon Plasma Enhanced CVD Grown on Porous Alumina Substrate | - |
dc.type | Conference | - |
dc.description.journalClass | 1 | - |
dc.identifier.bibliographicCitation | 9th IEEE Conference on Nanotechnology, pp.659 - 661 | - |
dc.citation.title | 9th IEEE Conference on Nanotechnology | - |
dc.citation.startPage | 659 | - |
dc.citation.endPage | 661 | - |
dc.citation.conferencePlace | IT | - |
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