Synthesis and Characterization of Fluoro-co-Phenyl Silsesquioxane (FCPSQ) for Low-k Dielectric Materials

Authors
Choi Seung-Sock이희승Eun Kyeong KimBaek Kyung YoulDong Hoon ChoiHwang, Seung Sang
Citation
KJF International Conference on Organic Materials for Electronics and Photonics, pp.P231
Keywords
silsesquioxane; fluorine polymer; dielectric material
URI
https://pubs.kist.re.kr/handle/201004/101214
Appears in Collections:
KIST Conference Paper > Others
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