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Nano-Scale Tribological Properties of Silicon Pillars with the Variation in Pitch

Authors

Pham Duc Cuong; Arvind Singh; KIM, JINSEOK; Yang Sung Wook; Yoon, Eui Sung

Citation

STLE/ASME International Joint Tribology Conference 2008, pp.1 - 3

URI

https://pubs.kist.re.kr/handle/201004/102165

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KIST Conference Paper > Others

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