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Development of PA-MOCVD machine with glow discharge : Application to the surface properties of metallic bipolar plate

Authors

Kwon, Oh Jib; Lee, Young Kook; HAN, SEUNG HEE; Eric Fleury

Citation

대한금속재료학회

Keywords

PAMOCVD; TiN; Glow discharge

URI

https://pubs.kist.re.kr/handle/201004/102505

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KIST Conference Paper > Others

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