DSpace at KIST: Deposition of Poly[2-(perfluorooctyl)ethyl acrylate] on Silicon Wafers by the Displacement of Two Immiscible Supercritical Phases (DISP)

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DC Field	Value	Language
dc.contributor.author	Kim, Jaehoon	-
dc.contributor.author	J. McClain	-
dc.contributor.author	R. Carbonell	-
dc.date.accessioned	2024-01-13T04:32:07Z	-
dc.date.available	2024-01-13T04:32:07Z	-
dc.date.created	2021-09-29	-
dc.identifier.uri	https://pubs.kist.re.kr/handle/201004/102569	-
dc.language	English	-
dc.subject	Deposition	-
dc.subject	Poly[2-(perfluorooctyl)ethyl acrylate]	-
dc.subject	Supercritical Fluids	-
dc.title	Deposition of Poly[2-(perfluorooctyl)ethyl acrylate] on Silicon Wafers by the Displacement of Two Immiscible Supercritical Phases (DISP)	-
dc.type	Conference	-
dc.description.journalClass	2	-
dc.identifier.bibliographicCitation	한국화학공학회	-
dc.citation.title	한국화학공학회	-
dc.citation.conferencePlace	KO	-

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