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Tunable property of post-RTA BST thin films on silicon prepared by pulsed laser deposition(PLD)

Authors

Lee, Chil Hyoung; Cho Kwang Hwan; KANG, CHONG YUN; Choi Doo Jin; Oh, Young-Jei

Citation

The International Conference of the Korean Ceramic Society for 50th Anniversary, pp.109

Keywords

Ferroelectric; Tunability; BST thin film; Rapid Thermal Annealing; Pulsed Laser Deposition

URI

https://pubs.kist.re.kr/handle/201004/102794

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KIST Conference Paper > Others

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