Full metadata record
DC Field | Value | Language |
---|---|---|
dc.contributor.author | Soo-Kil Kim | - |
dc.contributor.author | John E. Bonevich | - |
dc.contributor.author | Daniel Josell | - |
dc.contributor.author | Thomas P. Moffat | - |
dc.date.accessioned | 2024-01-13T06:00:55Z | - |
dc.date.available | 2024-01-13T06:00:55Z | - |
dc.date.created | 2021-09-29 | - |
dc.identifier.uri | https://pubs.kist.re.kr/handle/201004/103285 | - |
dc.language | English | - |
dc.subject | Ni | - |
dc.subject | Electrodeposition | - |
dc.subject | trench | - |
dc.subject | leveling | - |
dc.title | Ni Electrodeposition in Sub-micrometer Trenches | - |
dc.type | Conference | - |
dc.description.journalClass | 1 | - |
dc.identifier.bibliographicCitation | International Soiciety of Electrochemistry | - |
dc.citation.title | International Soiciety of Electrochemistry | - |
dc.citation.conferencePlace | CN | - |
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