DSpace at KIST: The effect of H2 content on characteristics of zinc oxide thin films on a poly ethylene terephthalate substrate prepared by ECR-MOCVD

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DC Field	Value	Language
dc.contributor.author	Park Ji Hun	-
dc.contributor.author	Dong Jin Byun	-
dc.contributor.author	Lee, Joong Kee	-
dc.date.accessioned	2024-01-13T06:03:47Z	-
dc.date.available	2024-01-13T06:03:47Z	-
dc.date.created	2021-09-29	-
dc.identifier.uri	https://pubs.kist.re.kr/handle/201004/103492	-
dc.language	English	-
dc.subject	ECR-MOCVD	-
dc.subject	ZnO	-
dc.subject	TCO	-
dc.title	The effect of H2 content on characteristics of zinc oxide thin films on a poly ethylene terephthalate substrate prepared by ECR-MOCVD	-
dc.title.alternative	H2 효과에 따른 ECR-MOCVD를 이용하여 poly ethylene terephthalate 위에 제조한 zinc oxide 박막의 특성 분석	-
dc.type	Conference	-
dc.description.journalClass	2	-
dc.identifier.bibliographicCitation	Theories and Applications of Chem. Eng., v.16, no.2, pp.2535 - 2538	-
dc.citation.title	Theories and Applications of Chem. Eng.	-
dc.citation.volume	16	-
dc.citation.number	2	-
dc.citation.startPage	2535	-
dc.citation.endPage	2538	-
dc.citation.conferencePlace	KO	-

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