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Effect of the porosity of PZT thick films on mass sensitivity and resonance force for cantilever type bio sensors

Authors

Park jae Hong; Kwon Tae-Yun; Yoon, Dae Sung; Kim, Tae Song; 김환

Citation

IEEE Sensors 2006

URI

https://pubs.kist.re.kr/handle/201004/103692

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KIST Conference Paper > Others

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