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dc.contributor.authorMi Jung-
dc.contributor.authorByun, Young Tae-
dc.contributor.authorJhon, Young Min-
dc.contributor.authorLee, Seok-
dc.contributor.authorKim, Sun Ho-
dc.contributor.authorMho,Sun-il-
dc.contributor.authorWoo, Deok Ha-
dc.date.accessioned2024-01-13T07:30:35Z-
dc.date.available2024-01-13T07:30:35Z-
dc.date.created2021-09-29-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/104060-
dc.languageEnglish-
dc.subjectGaAs Nanohole Array-
dc.subjectICP-RIE-
dc.subjectNanoporous Alumina Mask-
dc.titleFormation of 30 nm GaAs Nanohole Array by ICP-RIE using Nanoporous Alumina Mask-
dc.typeConference-
dc.description.journalClass2-
dc.identifier.bibliographicCitation82회 한국물리학회 학술논문발표, pp.99-
dc.citation.title82회 한국물리학회 학술논문발표-
dc.citation.startPage99-
dc.citation.endPage99-
dc.citation.conferencePlaceKO-
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