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Growth and characterization of SrZrO3:Cr films on Si substrates for commercial memory device applicaion

Other Titles

메모리 소자용 SrZrO3:Cr 박막의 성장 및 전기적 특성 평가

Authors

Jae-Wan Park; Jong-Wan Park; Yang Min Kyu; Jung Kyoo-Ho; Lee, Jeon Kook

Citation

강유전체 연합 심포지움, 무주

Keywords

resistive switching; SrZrO3; Cr doping; memory device; sputtering

URI

https://pubs.kist.re.kr/handle/201004/104114

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KIST Conference Paper > Others

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