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High capacitance density of anodized TiO2 films for embedded capacitors

Other Titles

임배디드 캐패시터용 양극산화 산화 티탄의 높은 캐패시턴스 밀도

Authors

Jung Seung Won; Min Hyung Seob; Jeong Whan Han; Lee, Jeon Kook

Citation

2006년 한국세라믹학회 춘계 총회 및 연구발표회

Keywords

embedded capacitor; TiO2; capacitance density; anodic oxidation

URI

https://pubs.kist.re.kr/handle/201004/104115

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KIST Conference Paper > Others

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