Full metadata record
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Oleg M. Vovk | - |
| dc.contributor.author | Lee, Joong Kee | - |
| dc.contributor.author | Song Jin O | - |
| dc.date.accessioned | 2024-01-13T07:31:54Z | - |
| dc.date.available | 2024-01-13T07:31:54Z | - |
| dc.date.created | 2021-09-29 | - |
| dc.identifier.uri | https://pubs.kist.re.kr/handle/201004/104152 | - |
| dc.language | English | - |
| dc.subject | carbon film | - |
| dc.subject | Rf sputtering | - |
| dc.subject | deposition | - |
| dc.subject | C60 | - |
| dc.title | Characteristics of carbon films deposited by RF plasma sputtering of the C60 target | - |
| dc.type | Conference | - |
| dc.description.journalClass | 2 | - |
| dc.identifier.bibliographicCitation | IUMRS-ICA-2006 | - |
| dc.citation.title | IUMRS-ICA-2006 | - |
| dc.citation.conferencePlace | KO | - |
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