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dc.contributor.authorJAE HONG PARK-
dc.contributor.authorKwon Tae-Yun-
dc.contributor.authorYoon, Dae Sung-
dc.contributor.authorKim, Tae Song-
dc.contributor.author김환-
dc.date.accessioned2024-01-13T08:31:30Z-
dc.date.available2024-01-13T08:31:30Z-
dc.date.created2021-09-29-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/104655-
dc.languageEnglish-
dc.subjectthick film-
dc.subjectcantilever-
dc.titleFabrication process and properties of PZT thick film cantilevers for bio sensing application-
dc.typeConference-
dc.description.journalClass2-
dc.identifier.bibliographicCitation한국센서학회 종합학술대회, pp.127 - 128-
dc.citation.title한국센서학회 종합학술대회-
dc.citation.startPage127-
dc.citation.endPage128-
dc.citation.conferencePlaceKO-
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