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dc.contributor.authorKim, Yong Tae-
dc.contributor.authorPark Ji Ho-
dc.contributor.author김희준-
dc.contributor.author이창우-
dc.date.accessioned2024-01-13T08:33:00Z-
dc.date.available2024-01-13T08:33:00Z-
dc.date.created2021-09-29-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/104759-
dc.title.alternativePulse Plasma Assisted Atomic Layer deposition 장치의 제작과 특성-
dc.typeConference-
dc.description.journalClass2-
dc.identifier.bibliographicCitation한국 반도체 및 디스플레이 장비 학회 2005년도 추계학술대회-
dc.citation.title한국 반도체 및 디스플레이 장비 학회 2005년도 추계학술대회-
dc.citation.conferencePlaceKO-
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