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dc.contributor.authorPARK JONG KOOK-
dc.contributor.authorShin Sang Won-
dc.contributor.authorJong-Han Lee-
dc.contributor.authorSONG, JONG HAN-
dc.contributor.authorKim, Sun Ho-
dc.contributor.authorJin Woo Park-
dc.contributor.authorByun, Young Tae-
dc.date.accessioned2024-01-13T08:33:40Z-
dc.date.available2024-01-13T08:33:40Z-
dc.date.created2021-09-29-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/104806-
dc.languageEnglish-
dc.subject광소자-
dc.subjectGOI 웨이퍼-
dc.subject수소 이온 주입-
dc.titleInvestigation on Hydrogen Ion Implantation for Fabrication of GaAs-on-insulator (GOI) wafer for Optical Devices-
dc.title.alternative광소자용 GOI 웨이퍼 제작을 위한 수소 이온 주입에 관한 연구-
dc.typeConference-
dc.description.journalClass2-
dc.identifier.bibliographicCitationPhotonics Conference 2005, pp.187 - 188-
dc.citation.titlePhotonics Conference 2005-
dc.citation.startPage187-
dc.citation.endPage188-
dc.citation.conferencePlaceKO-
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