Full metadata record
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Hyun Sang Sim | - |
| dc.contributor.author | Park Ji Ho | - |
| dc.contributor.author | Kim, Seong Il | - |
| dc.contributor.author | Kim, Yong Tae | - |
| dc.date.accessioned | 2024-01-13T10:03:19Z | - |
| dc.date.available | 2024-01-13T10:03:19Z | - |
| dc.date.created | 2021-09-29 | - |
| dc.identifier.uri | https://pubs.kist.re.kr/handle/201004/105569 | - |
| dc.language | English | - |
| dc.title | Improvement of W-N films Using WF6 Pulse Plasma Atomic Layer Deposition | - |
| dc.type | Conference | - |
| dc.description.journalClass | 1 | - |
| dc.identifier.bibliographicCitation | International Conference on Electrical Engineering 2004, v.1, pp.333 - 336 | - |
| dc.citation.title | International Conference on Electrical Engineering 2004 | - |
| dc.citation.volume | 1 | - |
| dc.citation.startPage | 333 | - |
| dc.citation.endPage | 336 | - |
| dc.citation.conferencePlace | JA | - |
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