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Effect of Pretreatment on the adhesion of copper film on PET substrate prepared by ECR-MOCVD coupled with a periodic DC bias

Authors

JEON BUP JU; 현진; 변동진; Lee, Joong Kee

Citation

10th APPCChE Congress

Keywords

Copper film; ECR-MOCVD; PET; Adhesion; DC bias

URI

https://pubs.kist.re.kr/handle/201004/105677

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KIST Conference Paper > Others

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