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Fabrication of High TCR Bolometric Thin Film Based on Low Temperature Annealing and its Application to the Surface Micromachined Uncooled Microbolometer

Authors

HAN YONG HEE; Choi In Hoon; Kim Kun Tae; NGUYEN CHI ANH; Shin, Hyun Joon; Moon, Sung Wook

Citation

ISAEM 2003 (3rd Inter. Sympo. on Designing, Processing and Properties of Advanced Engineering Materi, pp.242

Keywords

bolometer; TCR; annealing

URI

https://pubs.kist.re.kr/handle/201004/105703

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KIST Conference Paper > Others

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