DSpace at KISTKIST Conference PaperOthers

Full metadata record

DC Field Value Language
dc.contributor.author우형주-
dc.contributor.author최한우-
dc.contributor.author김준곤-
dc.contributor.author홍완-
dc.contributor.author김기동-
dc.contributor.authorByun, Young Tae-
dc.date.accessioned2024-01-13T11:00:34Z-
dc.date.available2024-01-13T11:00:34Z-
dc.date.created2021-09-29-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/105924-
dc.languageEnglish-
dc.subjectSOI 웨이퍼-
dc.subject양성자 주입-
dc.subjectIon-cut-
dc.subjectERD-
dc.subjectSIMS-
dc.subject열처리-
dc.titleStudy on the proton implantation process for the fabrication of SOI wafer-
dc.title.alternativeSOI웨이퍼 제조를 위한 양성자주입공정 연구-
dc.typeConference-
dc.description.journalClass2-
dc.identifier.bibliographicCitation2003 KAPRA & KPS/DPP Joint Workshop, pp.38 - 41-
dc.citation.title2003 KAPRA & KPS/DPP Joint Workshop-
dc.citation.startPage38-
dc.citation.endPage41-
dc.citation.conferencePlaceKO-
Appears in Collections:
KIST Conference Paper > Others
Files in This Item:
There are no files associated with this item.
Export
RIS (EndNote)
XLS (Excel)
XML
Show Simple Item Record

qrcode

Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.

BROWSE