DSpace at KISTKIST Conference PaperOthers

Full metadata record

DC Field Value Language
dc.contributor.authorHyoung Kwon Kim-
dc.contributor.authorByun, Young Tae-
dc.contributor.authorKim, Sun Ho-
dc.contributor.authorSang Kook Han-
dc.date.accessioned2024-01-13T11:00:56Z-
dc.date.available2024-01-13T11:00:56Z-
dc.date.created2021-09-29-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/105950-
dc.languageEnglish-
dc.subjectSOI-
dc.subjectSmart-cut-
dc.subject이온주입-
dc.subject열산화막-
dc.subjectCMP연마-
dc.titleExperimental study on SOI fabrication using Smart-cut technology-
dc.title.alternativeSmart-cut 기술을 이용한 SOI 제작에 관한 실험적 고찰-
dc.typeConference-
dc.description.journalClass2-
dc.identifier.bibliographicCitationPhotonics Conference 2003, pp.185 - 186-
dc.citation.titlePhotonics Conference 2003-
dc.citation.startPage185-
dc.citation.endPage186-
dc.citation.conferencePlaceKO-
Appears in Collections:
KIST Conference Paper > Others
Files in This Item:
There are no files associated with this item.
Export
RIS (EndNote)
XLS (Excel)
XML
Show Simple Item Record

qrcode

Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.

BROWSE