Full metadata record
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Ui Hui Kown | - |
| dc.contributor.author | Choi, Sun-Hee | - |
| dc.contributor.author | Tae Won Seo | - |
| dc.contributor.author | Won Jong Lee | - |
| dc.date.accessioned | 2024-01-13T11:01:53Z | - |
| dc.date.available | 2024-01-13T11:01:53Z | - |
| dc.date.created | 2021-09-29 | - |
| dc.identifier.uri | https://pubs.kist.re.kr/handle/201004/106013 | - |
| dc.language | English | - |
| dc.title | Multi-scale simulation of plasma generation and film deposition in a circular type DC magnetron sputtering system | - |
| dc.type | Conference | - |
| dc.description.journalClass | 2 | - |
| dc.identifier.bibliographicCitation | The 4th Asian-European International Conference on Plasma Surface Engineering, pp.184 | - |
| dc.citation.title | The 4th Asian-European International Conference on Plasma Surface Engineering | - |
| dc.citation.startPage | 184 | - |
| dc.citation.endPage | 184 | - |
| dc.citation.conferencePlace | KO | - |
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