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Effect of plasma immersing on crystallinity of vanadium oxide cathode film grown at room temperature during D.C. reactive sputtering

Authors

Choi Sun-Hee; Young-Ah Jeon; Yoon Young Soo

Citation

The 4th Asian-European International Conference on Plasma Surface Engineering, pp.178

Keywords

thin film battery; thin film supercapacitor; SnO₂-RuO₂ composite; hybrid; monolithic

URI

https://pubs.kist.re.kr/handle/201004/106096

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KIST Conference Paper > Others

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