DSpace at KISTKIST Conference PaperOthers

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dc.contributor.authorKIM, SUNG KYU-
dc.contributor.author손정영-
dc.contributor.author남동석-
dc.contributor.author한우성-
dc.contributor.author이호찬-
dc.contributor.author이재현-
dc.contributor.author김재순-
dc.date.accessioned2024-01-13T11:04:05Z-
dc.date.available2024-01-13T11:04:05Z-
dc.date.created2021-09-29-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/106152-
dc.languageEnglish-
dc.subjectIFTA-
dc.subject위상소자-
dc.subject반도체-
dc.subject해상도 향상-
dc.titleGeneration of illumination pattern by IFTA method-
dc.title.alternativeIFTA 방법을 이용한 조명 패턴 생성-
dc.typeConference-
dc.description.journalClass2-
dc.identifier.bibliographicCitation한국광학회 2003년도 하계학술 발표회, pp.292 - 293-
dc.citation.title한국광학회 2003년도 하계학술 발표회-
dc.citation.startPage292-
dc.citation.endPage293-
dc.citation.conferencePlaceKO-
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