DSpace at KISTKIST Conference PaperOthers

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dc.contributor.author김태엽-
dc.contributor.author허재성-
dc.contributor.authorMoon Sung Wook-
dc.contributor.authorShin Hyun Joon-
dc.contributor.authorLEE SANG YOUL-
dc.date.accessioned2024-01-13T11:30:23Z-
dc.date.available2024-01-13T11:30:23Z-
dc.date.created2021-09-29-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/106181-
dc.languageEnglish-
dc.subject구동기-
dc.subject광감쇄기-
dc.subjectSOI-
dc.subjectDRIE-
dc.titleVOA fabrication with symmetric actuator-
dc.title.alternative대칭구동기를 갖는 가변 광 감쇄기의 제작-
dc.typeConference-
dc.description.journalClass2-
dc.identifier.bibliographicCitation2003 년도 대한전기학회 하계학술대회 논문집, pp.1912 - 1913-
dc.citation.title2003 년도 대한전기학회 하계학술대회 논문집-
dc.citation.startPage1912-
dc.citation.endPage1913-
dc.citation.conferencePlaceKO-
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