DSpace at KIST: Fabrication of 3-D structures with different scales and angles using inclined and bottom side expose method at selected position

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DC Field	Value	Language
dc.contributor.author	이준섭	-
dc.contributor.author	Shin Hyun Joon	-
dc.contributor.author	Moon Sung Wook	-
dc.contributor.author	송석호	-
dc.contributor.author	KIM SHIN GEUN	-
dc.date.accessioned	2024-01-13T11:33:08Z	-
dc.date.available	2024-01-13T11:33:08Z	-
dc.date.created	2021-09-29	-
dc.identifier.uri	https://pubs.kist.re.kr/handle/201004/106359	-
dc.language	English	-
dc.subject	감광제	-
dc.subject	경사노광	-
dc.subject	후면 노광	-
dc.subject	3차원 구조물	-
dc.title	Fabrication of 3-D structures with different scales and angles using inclined and bottom side expose method at selected position	-
dc.title.alternative	선택 위치에서의 경사와 후면 노광을 이용한 다양한 규모와 각도의 3 차원 구조물 제작	-
dc.type	Conference	-
dc.description.journalClass	2	-
dc.identifier.bibliographicCitation	제5회 MEMS 학술대회 초록집, pp.145 - 149	-
dc.citation.title	제5회 MEMS 학술대회 초록집	-
dc.citation.startPage	145	-
dc.citation.endPage	149	-
dc.citation.conferencePlace	KO	-

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