DSpace at KISTKIST Conference PaperOthers

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dc.contributor.authorJONG-YEON PARK-
dc.contributor.authorKIM GEUN TAE-
dc.contributor.authorMoon Sung Wook-
dc.contributor.authorPARK JEONG HO-
dc.date.accessioned2024-01-13T12:00:56Z-
dc.date.available2024-01-13T12:00:56Z-
dc.date.created2021-09-29-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/106482-
dc.languageEnglish-
dc.subject3D MEMS antenna-
dc.subjectantenna-
dc.subjectlithography-
dc.subjectbonding-
dc.subjectplastic micromachining-
dc.titleFabrication of 3D MEMS antenna array for infrared detector using novel UV-lithography apparatus, plastic micro machining and micro assembly technique-
dc.typeConference-
dc.description.journalClass1-
dc.identifier.bibliographicCitationNanotech 2003-
dc.citation.titleNanotech 2003-
dc.citation.conferencePlaceUS-
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