DSpace at KIST: Preparation of Cu films on polymer substrate by ECR-MOCVD coupled with DC bias at room temperature

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DC Field	Value	Language
dc.contributor.author	Lee Joong Kee	-
dc.contributor.author	Cho Byung Won	-
dc.date.accessioned	2024-01-13T12:01:53Z	-
dc.date.available	2024-01-13T12:01:53Z	-
dc.date.created	2021-09-29	-
dc.identifier.uri	https://pubs.kist.re.kr/handle/201004/106543	-
dc.language	English	-
dc.subject	Cu film	-
dc.subject	ECR-MOCVD	-
dc.subject	DC bias	-
dc.subject	room temperature	-
dc.title	Preparation of Cu films on polymer substrate by ECR-MOCVD coupled with DC bias at room temperature	-
dc.type	Conference	-
dc.description.journalClass	1	-
dc.identifier.bibliographicCitation	The Electrochemical Society Proceedings, pp.82 - 92	-
dc.citation.title	The Electrochemical Society Proceedings	-
dc.citation.startPage	82	-
dc.citation.endPage	92	-
dc.citation.conferencePlace	US	-

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