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dc.contributor.authorKIM KYUNG HWAN-
dc.contributor.authorKIM DEOK HO-
dc.contributor.authorSEOK JOO YI-
dc.contributor.author이재훈-
dc.date.accessioned2024-01-13T12:03:46Z-
dc.date.available2024-01-13T12:03:46Z-
dc.date.created2021-09-29-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/106664-
dc.languageEnglish-
dc.subjecthybrid-
dc.subjectmicroassembly-
dc.subjectMEMS-
dc.subjectmicromanipulation-
dc.titleHybrid microassembly system for three-dimensional MEMS components-
dc.typeConference-
dc.description.journalClass1-
dc.identifier.bibliographicCitationProceedings of 2002 Int'l Workshop on Microfactory, pp.21 - 24-
dc.citation.titleProceedings of 2002 Int'l Workshop on Microfactory-
dc.citation.startPage21-
dc.citation.endPage24-
dc.citation.conferencePlaceUS-
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