DSpace at KISTKIST Conference PaperOthers

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dc.contributor.author채경수-
dc.contributor.author정대석-
dc.contributor.author김종용-
dc.contributor.author김태엽-
dc.contributor.authorShin Hyun Joon-
dc.contributor.author문성옥-
dc.contributor.authorOH MYUNG HWAN-
dc.date.accessioned2024-01-13T12:31:18Z-
dc.date.available2024-01-13T12:31:18Z-
dc.date.created2021-09-29-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/106773-
dc.languageEnglish-
dc.subjectMEMS-
dc.subjectUV-LIGA-
dc.subjectnickel-
dc.subjectoptical switch-
dc.titleLow-cost fabrication of high aspect ratio metallic structure for optical switch application using UV-LIGA process-
dc.typeConference-
dc.description.journalClass2-
dc.identifier.bibliographicCitationProceedings of ICEE, pp.1291 - 1294-
dc.citation.titleProceedings of ICEE-
dc.citation.startPage1291-
dc.citation.endPage1294-
dc.citation.conferencePlaceKO-
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