Full metadata record
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | PARK HYUN MEE | - |
| dc.contributor.author | KIM YOUNG MAN | - |
| dc.contributor.author | LEE KANG BONG | - |
| dc.date.accessioned | 2024-01-13T12:31:34Z | - |
| dc.date.available | 2024-01-13T12:31:34Z | - |
| dc.date.created | 2021-09-29 | - |
| dc.identifier.uri | https://pubs.kist.re.kr/handle/201004/106789 | - |
| dc.language | English | - |
| dc.subject | silicon wafers | - |
| dc.subject | Contaminants | - |
| dc.title | Evaluation of origin for trace organic contaminants adsorbing on the surface of silicon wafers. | - |
| dc.type | Conference | - |
| dc.description.journalClass | 2 | - |
| dc.identifier.bibliographicCitation | Interact 2002, pp.252 | - |
| dc.citation.title | Interact 2002 | - |
| dc.citation.startPage | 252 | - |
| dc.citation.endPage | 252 | - |
| dc.citation.conferencePlace | KO | - |
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