DSpace at KIST: Diamond thick film deposition in wafer scale using single-cathode direct current (DC) plasma assistedschemical vapour deposition(PACVD).

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DC Field	Value	Language
dc.contributor.author	Baik Young Joon	-
dc.contributor.author	채기웅	-
dc.contributor.author	Lee Wook Seong	-
dc.date.accessioned	2024-01-13T12:31:43Z	-
dc.date.available	2024-01-13T12:31:43Z	-
dc.date.created	2021-09-29	-
dc.identifier.uri	https://pubs.kist.re.kr/handle/201004/106798	-
dc.language	English	-
dc.title	Diamond thick film deposition in wafer scale using single-cathode direct current (DC) plasma assistedschemical vapour deposition(PACVD).	-
dc.type	Conference	-
dc.description.journalClass	2	-
dc.identifier.bibliographicCitation	The 6th APCPST, 15th SPSM, and 11th KAPRA	-
dc.citation.title	The 6th APCPST, 15th SPSM, and 11th KAPRA	-
dc.citation.conferencePlace	KO	-

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