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dc.contributor.author정증현-
dc.contributor.authorBaik Young Joon-
dc.contributor.author권동길-
dc.date.accessioned2024-01-13T12:31:54Z-
dc.date.available2024-01-13T12:31:54Z-
dc.date.created2021-09-29-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/106810-
dc.languageEnglish-
dc.titleAn analytical model for intrinsic residual stress effect on out-of-plane chemical-vapor-deposited free-standing thick film.-
dc.typeConference-
dc.description.journalClass1-
dc.identifier.bibliographicCitationMaterials Research Society symposia proceedings, v.v. 695, pp.285 - 290.-
dc.citation.titleMaterials Research Society symposia proceedings-
dc.citation.volumev. 695-
dc.citation.startPage285-
dc.citation.endPage290.-
dc.citation.conferencePlaceUS-
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KIST Conference Paper > Others
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