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dc.contributor.authorMoon Sung Wook-
dc.contributor.author김종용-
dc.contributor.authorShin Hyun Joon-
dc.date.accessioned2024-01-13T13:30:46Z-
dc.date.available2024-01-13T13:30:46Z-
dc.date.created2021-09-29-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/107271-
dc.languageEnglish-
dc.subjectMEMS-
dc.subjectactuator-
dc.titleApplication of MEMS technology to actuators-
dc.title.alternativeMEMS 기술의 엑츄에이터 응용-
dc.typeConference-
dc.description.journalClass2-
dc.identifier.bibliographicCitation대한설비공학회, pp.159 - 166-
dc.citation.title대한설비공학회-
dc.citation.startPage159-
dc.citation.endPage166-
dc.citation.conferencePlaceKO-
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