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dc.contributor.authorLee Joong Kee-
dc.contributor.authorJEON BUP JU-
dc.contributor.authorCho Byung Won-
dc.contributor.authorPark Dal keun-
dc.contributor.author고형덕-
dc.contributor.authorByun Dongjin-
dc.date.accessioned2024-01-13T13:31:29Z-
dc.date.available2024-01-13T13:31:29Z-
dc.date.created2021-09-29-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/107317-
dc.languageEnglish-
dc.subjectECR-MOCVD-
dc.subjectDC bias-
dc.subjectCu/C films-
dc.subjectsheet electric resistance-
dc.titleCharacteristics of Cu/C films on polymer substrate by ECR chemical vapor deposition-
dc.typeConference-
dc.description.journalClass1-
dc.identifier.bibliographicCitationProceedings of 9th APCChE Congress, pp.#500-
dc.citation.titleProceedings of 9th APCChE Congress-
dc.citation.startPage#500-
dc.citation.endPage#500-
dc.citation.conferencePlaceNZ-
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