Full metadata record
DC Field | Value | Language |
---|---|---|
dc.contributor.author | Lee Joong Kee | - |
dc.contributor.author | JEON BUP JU | - |
dc.contributor.author | Cho Byung Won | - |
dc.contributor.author | Park Dal keun | - |
dc.contributor.author | 고형덕 | - |
dc.contributor.author | Byun Dongjin | - |
dc.date.accessioned | 2024-01-13T13:31:30Z | - |
dc.date.available | 2024-01-13T13:31:30Z | - |
dc.date.created | 2021-09-29 | - |
dc.identifier.uri | https://pubs.kist.re.kr/handle/201004/107318 | - |
dc.language | English | - |
dc.subject | ECR-MOCVD | - |
dc.title | Characteristics of Cu/C films on polymer substrate by ECR chemical vapor deposition | - |
dc.type | Conference | - |
dc.description.journalClass | 1 | - |
dc.identifier.bibliographicCitation | 9th APCChE Congress and CHEMECA 2002, pp.#500. | - |
dc.citation.title | 9th APCChE Congress and CHEMECA 2002 | - |
dc.citation.startPage | #500. | - |
dc.citation.endPage | #500. | - |
dc.citation.conferencePlace | NZ | - |
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