DSpace at KISTKIST Conference PaperOthers

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dc.contributor.author심원철-
dc.contributor.author김대호-
dc.contributor.authorKIM KI HOON-
dc.contributor.author권기영-
dc.contributor.authorKim Byung Kyu-
dc.contributor.authorCHOI BUM KU-
dc.contributor.author양상식-
dc.contributor.authorPark Jong Oh-
dc.date.accessioned2024-01-13T14:01:50Z-
dc.date.available2024-01-13T14:01:50Z-
dc.date.created2021-09-29-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/107608-
dc.languageEnglish-
dc.subjectparylene-
dc.titleFabrication, test and simulation of a parylene diaphragm-
dc.typeConference-
dc.description.journalClass1-
dc.identifier.bibliographicCitationTRANSDUCERS'01 EUROSENSORS XV The 11th International Conference on Soild-State Sensors and Actuator, pp.1382 - 1385.-
dc.citation.titleTRANSDUCERS'01 EUROSENSORS XV The 11th International Conference on Soild-State Sensors and Actuator-
dc.citation.startPage1382-
dc.citation.endPage1385.-
dc.citation.conferencePlaceGW-
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