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dc.contributor.author심현상-
dc.contributor.authorKim Yong Tae-
dc.contributor.author전형탁-
dc.date.accessioned2024-01-13T14:02:45Z-
dc.date.available2024-01-13T14:02:45Z-
dc.date.created2021-09-29-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/107670-
dc.languageEnglish-
dc.subjectatomic layer deposition-
dc.titleCharacteristic of tungsten nitride atomic layer deposition-
dc.typeConference-
dc.description.journalClass1-
dc.identifier.bibliographicCitationAtomic Layer Deposition(ALD2001) Conference-
dc.citation.titleAtomic Layer Deposition(ALD2001) Conference-
dc.citation.conferencePlaceUS-

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