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High quality screen printed piezoelectric thick film fabrication for piezocantilever application

Authors

김용범; KIM HYUNG JOON; 천채일; CHOI DOO JIN; Kim Tae Song

Citation

Intelligent Microsystem Symposium, pp.17 - 21

Keywords

PZT

URI

https://pubs.kist.re.kr/handle/201004/107761

Appears in Collections:

KIST Conference Paper > Others

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