DSpace at KISTKIST Conference PaperOthers

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dc.contributor.authorKim Hun-
dc.contributor.author박종원-
dc.contributor.author이주원-
dc.contributor.authorLEE YUN HI-
dc.contributor.author장진-
dc.contributor.authorJu Byeong Kwon-
dc.date.accessioned2024-01-13T14:31:02Z-
dc.date.available2024-01-13T14:31:02Z-
dc.date.created2021-09-29-
dc.date.issued2001-04-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/107824-
dc.subjectsputtering-
dc.title스퍼터링 증착 조건에 따른 Cr 박막의 건식식각 특성 평가 및 응용-
dc.typeConference-
dc.description.journalClass2-
dc.identifier.bibliographicCitation물리학회 춘계학술발표회, pp.206-
dc.citation.title물리학회 춘계학술발표회-
dc.citation.startPage206-
dc.citation.endPage206-
dc.citation.conferencePlaceKO-
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