DSpace at KISTKIST Conference PaperOthers

Full metadata record

DC Field Value Language
dc.contributor.authorKim Hun-
dc.contributor.author박종원-
dc.contributor.author이주원-
dc.contributor.authorLEE YUN HI-
dc.contributor.author장진-
dc.contributor.authorJu Byeong Kwon-
dc.date.accessioned2024-01-13T14:31:02Z-
dc.date.available2024-01-13T14:31:02Z-
dc.date.created2021-09-29-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/107824-
dc.subjectsputtering-
dc.title.alternative스퍼터링 증착 조건에 따른 Cr 박막의 건식식각 특성 평가 및 응용-
dc.typeConference-
dc.description.journalClass2-
dc.identifier.bibliographicCitation물리학회 춘계학술발표회, pp.206-
dc.citation.title물리학회 춘계학술발표회-
dc.citation.startPage206-
dc.citation.endPage206-
dc.citation.conferencePlaceKO-
Appears in Collections:
KIST Conference Paper > Others
Files in This Item:
There are no files associated with this item.
Export
RIS (EndNote)
XLS (Excel)
XML
Show Simple Item Record

qrcode

Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.

BROWSE