Full metadata record
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Cho Young Sang | - |
| dc.contributor.author | JUNG SO YOUN | - |
| dc.contributor.author | KIM JU HEE | - |
| dc.contributor.author | Young Ill Kim | - |
| dc.contributor.author | 조철형 | - |
| dc.contributor.author | 김우식 | - |
| dc.date.accessioned | 2024-01-13T14:31:37Z | - |
| dc.date.available | 2024-01-13T14:31:37Z | - |
| dc.date.created | 2021-09-29 | - |
| dc.identifier.uri | https://pubs.kist.re.kr/handle/201004/107861 | - |
| dc.language | English | - |
| dc.subject | wastewater recycle | - |
| dc.subject | CMP wastewater | - |
| dc.title | A study on CMP wastewater recycle | - |
| dc.type | Conference | - |
| dc.description.journalClass | 2 | - |
| dc.identifier.bibliographicCitation | Korea-America Semiconductor Symposium Proceedings, pp.245 - 261 | - |
| dc.citation.title | Korea-America Semiconductor Symposium Proceedings | - |
| dc.citation.startPage | 245 | - |
| dc.citation.endPage | 261 | - |
| dc.citation.conferencePlace | KO | - |
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